Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-12-31 |
| 6492283 | Method of forming ultrathin oxide layer | Yong-Bae Kim, Marko Tuominen, Suvi Haukka | 2002-12-10 |
| 6482733 | Protective layers prior to alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2002-11-19 |
| 6454865 | Low mass wafer support system | Matthew G. Goodman, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2002-09-24 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-09-03 |
| 6435799 | Wafer transfer arm stop | Dennis L. Goodwin, Eric Wood | 2002-08-20 |
| 6435809 | Dual arm linear hand-off wafer transfer assembly | Dennis L. Goodwin, Eric Wood | 2002-08-20 |
| 6420864 | Modular substrate measurement system | Michael Abraham, Alain Gaudon, Pierre Astegno | 2002-07-16 |
| 6383330 | Quartz wafer processing chamber | — | 2002-05-07 |
| 6368051 | Multi-position load lock chamber | — | 2002-04-09 |
| 6354791 | Water lift mechanism with electrostatic pickup and method for transferring a workpiece | Joe Wytman | 2002-03-12 |
| 6348420 | Situ dielectric stacks | Chris Werkhoven | 2002-02-19 |
| 6340415 | Method and apparatus for enhancing a sputtering target's lifetime | Robert S. Busacca, John W. Lane | 2002-01-22 |