Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482733 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Ernst H. A. Granneman, Suvi Haukka | 2002-11-19 |
| 6447607 | Apparatus for growing thin films | Vaino Kilpi | 2002-09-10 |