Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500780 | Method for preparing heterogeneous catalysts of desired metal content | Tuomo Suntola, Arla Kytökivi, Eeva-Liisa Lakomaa, Marina Lindblad, Jukka Hietala +5 more | 2002-12-31 |
| 6492283 | Method of forming ultrathin oxide layer | Ivo Raaijmakers, Yong-Bae Kim, Marko Tuominen | 2002-12-10 |
| 6482262 | Deposition of transition metal carbides | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2002-11-19 |
| 6482733 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman | 2002-11-19 |
| 6482740 | Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH | Pekka Soininen, Kai-Erik Elers | 2002-11-19 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2002-05-21 |