Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482262 | Deposition of transition metal carbides | Kai-Erik Elers, Suvi Haukka, Sari Johanna Kaipio, Pekka Soininen | 2002-11-19 |
| 6475276 | Production of elemental thin films using a boron-containing reducing agent | Kai-Erik Elers, Sari Johanna Kaipio, Pekka Soininen | 2002-11-05 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Pekka Soininen, Suvi Haukka | 2002-05-21 |