Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2002-05-21 |