Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495453 | Method for improving the quality of a metal layer deposited from a plating bath | Sywert Brongersma, Emmanuel Richard, Iwan Vervoort | 2002-12-17 |
| 6435008 | Apparatus and method for determining porosity | Mikhail Baklanov, Fedor Nikolaevich Dultsev, Konstantin Mogilnikov | 2002-08-20 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2002-05-21 |