Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482262 | Deposition of transition metal carbides | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen | 2002-11-19 |
| 6475276 | Production of elemental thin films using a boron-containing reducing agent | Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2002-11-05 |