Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Ivo Raaijmakers +1 more | 2002-12-31 |
| 6461435 | Showerhead with reduced contact area | Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Ivo Raaijmakers +1 more | 2002-09-03 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Bruce W. Peuse, Yu-Chia Chang | 2002-07-23 |