Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500266 | Heater temperature uniformity qualification tool | Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li +1 more | 2002-12-31 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |