Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479307 | Method of monitoring loss of silicon nitride | Shu-Ya Chuang, Gow-Wei Sun, Ga-Ming Hong, Pei-Jen Wang | 2002-11-12 |
| 6423949 | Multi-zone resistive heater | Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |