Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau | 2002-07-23 |
| 6394886 | Conformal disk holder for CMP pad conditioner | Wen-Ten Chen, Yao-Hsiang Liang, Chih-I Peng | 2002-05-28 |