Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394886 | Conformal disk holder for CMP pad conditioner | Wen-Ten Chen, Chih-I Peng, Yu-Chia Chang | 2002-05-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394886 | Conformal disk holder for CMP pad conditioner | Wen-Ten Chen, Chih-I Peng, Yu-Chia Chang | 2002-05-28 |