Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455421 | Plasma treatment of tantalum nitride compound films formed by chemical vapor deposition | Toshio Itoh, Christophe Marcadal | 2002-09-24 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |