Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |