Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494955 | Ceramic substrate support | Sal Umotoy, Xiaoxiong Yuan, Anzhong Chang, Hongbee Teoh, Anh N. Nguyen +1 more | 2002-12-17 |
| 6436192 | Apparatus for aligning a wafer | Ling Chen, Joseph Yudovsky, Ying Yu | 2002-08-20 |
| 6430468 | Method and apparatus for accurate placement of semiconductor wafers onto respective platforms within a single reaction chamber | Avi Tepman | 2002-08-06 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Son Trinh, Anzhong Chang +1 more | 2002-04-23 |
| 6374512 | Method for reducing contamination of a substrate in a substrate processing system | Xin Sheng Guo, Shin-Hung Li | 2002-04-23 |
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | David T. Or, Keith Kuang-Kuo Koai, Fufa Chen | 2002-04-02 |
| 6364954 | High temperature chemical vapor deposition chamber | Salvador P. Umotoy, Steve H. Chiao, Anh N. Nguyen, Be Van Vo, Joel M. Huston +1 more | 2002-04-02 |