Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440261 | Dual buffer chamber cluster tool for semiconductor wafer processing | Donald Olgado, Allen L. D'Ambra | 2002-08-27 |
| 6430468 | Method and apparatus for accurate placement of semiconductor wafers onto respective platforms within a single reaction chamber | Lawrence Chung-Lai Lei | 2002-08-06 |
| 6379466 | Temperature controlled gas distribution plate | Turgut Sahin, Salvador P. Umotoy, Ronald L. Rose | 2002-04-30 |
| 6368469 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes +2 more | 2002-04-09 |
| 6350353 | Alternate steps of IMP and sputtering process to improve sidewall coverage | Praburam Gopalraja, Sergio Edelstein, Peijun Ding, Debabrata Ghosh, Nirmalya Maity | 2002-02-26 |