Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368469 | Coils for generating a plasma and for sputtering | Jaim Nulman, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2002-04-09 |
| 6350353 | Alternate steps of IMP and sputtering process to improve sidewall coverage | Praburam Gopalraja, Avi Tepman, Peijun Ding, Debabrata Ghosh, Nirmalya Maity | 2002-02-26 |