Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455921 | Fabricating plug and near-zero overlap interconnect line | Seshadri Ramaswami | 2002-09-24 |
| 6456894 | Semiconductor processing techniques | — | 2002-09-24 |
| 6408220 | Semiconductor processing techniques | — | 2002-06-18 |
| 6368469 | Coils for generating a plasma and for sputtering | Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2002-04-09 |
| 6361618 | Methods and apparatus for forming and maintaining high vacuum environments | — | 2002-03-26 |