Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486444 | Load-lock with external staging area | Kevin Fairbairn, Christopher T. Lane, Kelly Colborne | 2002-11-26 |
| 6468353 | Method and apparatus for improved substrate handling | Ilya Perlov, Alexey Goder, Eugene Gantvarg | 2002-10-22 |
| 6409890 | Method and apparatus for forming a uniform layer on a workpiece during sputtering | Zheng Xu, Praburam Gopalraja, John C. Forster, Ralf Hofmann, Anantha K. Subramani | 2002-06-25 |
| 6368469 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Avi Tepman +2 more | 2002-04-09 |