Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409890 | Method and apparatus for forming a uniform layer on a workpiece during sputtering | Howard Grunes, Zheng Xu, Praburam Gopalraja, John C. Forster, Anantha K. Subramani | 2002-06-25 |