Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409890 | Method and apparatus for forming a uniform layer on a workpiece during sputtering | Howard Grunes, Zheng Xu, Praburam Gopalraja, John C. Forster, Ralf Hofmann | 2002-06-25 |
| 6406599 | Magnetron with a rotating center magnet for a vault shaped sputtering target | Umesh M. Kelkar, Jianming Fu, Praburam Gopalraja | 2002-06-18 |