Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468353 | Method and apparatus for improved substrate handling | Ilya Perlov, Alexey Goder, Howard Grunes | 2002-10-22 |
| 6393337 | Method and apparatus for orienting substrates | Ilya Perlov, Leonid M. Tertitski | 2002-05-21 |
| 6374508 | Apparatus and method for aligning a substrate on a support member | Joseph Yudovsky, Kenneth Tsai, Ilya Perlov | 2002-04-23 |