Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more | 2002-10-15 |
| 6436192 | Apparatus for aligning a wafer | Ling Chen, Ying Yu, Lawrence Chung-Lai Lei | 2002-08-20 |
| 6374508 | Apparatus and method for aligning a substrate on a support member | Kenneth Tsai, Ilya Perlov, Eugene Gantvarg | 2002-04-23 |
| 6375748 | Method and apparatus for preventing edge deposition | Tom Madar, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted G. Yoshidome +4 more | 2002-02-26 |