Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494955 | Ceramic substrate support | Lawrence Chung-Lai Lei, Sal Umotoy, Xiaoxiong Yuan, Hongbee Teoh, Anh N. Nguyen +1 more | 2002-12-17 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao +4 more | 2002-10-08 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei +1 more | 2002-04-23 |