Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Son Trinh, Chien-Teh Kao, Ken Kaung Lai +4 more | 2002-10-08 |
| 6379466 | Temperature controlled gas distribution plate | Turgut Sahin, Avi Tepman, Ronald L. Rose | 2002-04-30 |
| 6375748 | Method and apparatus for preventing edge deposition | Joseph Yudovsky, Tom Madar, Son Trinh, Lawrence Chung-Lai Lei, Anzhong Chang +1 more | 2002-04-23 |
| 6364954 | High temperature chemical vapor deposition chamber | Steve H. Chiao, Anh N. Nguyen, Be Van Vo, Joel M. Huston, James Jin-Long Chen +1 more | 2002-04-02 |