Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498091 | Method of using a barrier sputter reactor to remove an underlying barrier layer | Seshadri Ganguli, Wei Cao, Christophe Marcadal | 2002-12-24 |
| 6436192 | Apparatus for aligning a wafer | Joseph Yudovsky, Ying Yu, Lawrence Chung-Lai Lei | 2002-08-20 |
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Keith Kuang-Kuo Koai, Mohan K. Bhan, Bo Zheng | 2002-06-25 |
| 6402806 | Method for unreacted precursor conversion and effluent removal | John V. Schmitt, George Michael Bleyle, Yu D. Cong, Alfred Mak, Mei Chang | 2002-06-11 |
| 6358323 | Method and apparatus for improved control of process and purge material in a substrate processing system | John V. Schmitt, Frank Chang, Xin Guo, Christophe Marcadal | 2002-03-19 |
| 6355106 | Deposition of copper with increased adhesion | Bo Zheng, Alfred Mak, Mei Chang | 2002-03-12 |