Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498091 | Method of using a barrier sputter reactor to remove an underlying barrier layer | Ling Chen, Wei Cao, Christophe Marcadal | 2002-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498091 | Method of using a barrier sputter reactor to remove an underlying barrier layer | Ling Chen, Wei Cao, Christophe Marcadal | 2002-12-24 |