Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402806 | Method for unreacted precursor conversion and effluent removal | John V. Schmitt, Ling Chen, George Michael Bleyle, Yu D. Cong, Mei Chang | 2002-06-11 |
| 6355106 | Deposition of copper with increased adhesion | Bo Zheng, Ling Chen, Mei Chang | 2002-03-12 |