Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao +4 more | 2002-10-08 |
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Keith Kuang-Kuo Koai, Ling Chen, Mohan K. Bhan | 2002-06-25 |
| 6355106 | Deposition of copper with increased adhesion | Ling Chen, Alfred Mak, Mei Chang | 2002-03-12 |