Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Keith Kuang-Kuo Koai, Ling Chen, Mohan K. Bhan, Bo Zheng | 2002-06-25 |
| 6374512 | Method for reducing contamination of a substrate in a substrate processing system | Shin-Hung Li, Lawrence Chung-Lai Lei | 2002-04-23 |