Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Keith Kuang-Kuo Koai, Ling Chen, Bo Zheng | 2002-06-25 |
MB
Mohan K. Bhan
Overall (2002): #149,473 of 266,432Top 60%
1
Patents 2002