Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Ling Chen, Mohan K. Bhan, Bo Zheng | 2002-06-25 |
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | David T. Or, Fufa Chen, Lawrence Chung-Lai Lei | 2002-04-02 |
| 6365495 | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature | Shulin Wang, Huan Luo, Ming Xi, Mei Chang, Russell C. Ellwanger | 2002-04-02 |