Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436820 | Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å | Jianhua Hu, Yin Lin, Fufa Chen, Yehuda Demayo | 2002-08-20 |
| 6365495 | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature | Shulin Wang, Huan Luo, Keith Kuang-Kuo Koai, Mei Chang, Russell C. Ellwanger | 2002-04-02 |