Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488776 | Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films | — | 2002-12-03 |
| 6410090 | Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films | — | 2002-06-25 |
| 6365495 | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature | Huan Luo, Keith Kuang-Kuo Koai, Ming Xi, Mei Chang, Russell C. Ellwanger | 2002-04-02 |