Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | Keith Kuang-Kuo Koai, Fufa Chen, Lawrence Chung-Lai Lei | 2002-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6364949 | 300 mm CVD chamber design for metal-organic thin film deposition | Keith Kuang-Kuo Koai, Fufa Chen, Lawrence Chung-Lai Lei | 2002-04-02 |