Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498898 | Uniform heat trace and secondary containment for delivery lines for processing system | — | 2002-12-24 |
| 6402806 | Method for unreacted precursor conversion and effluent removal | Ling Chen, George Michael Bleyle, Yu D. Cong, Alfred Mak, Mei Chang | 2002-06-11 |
| 6358323 | Method and apparatus for improved control of process and purge material in a substrate processing system | Frank Chang, Xin Guo, Ling Chen, Christophe Marcadal | 2002-03-19 |