Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395128 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Sujit Sharan, Gurtej S. Sandhu, Mei Chang | 2002-05-28 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Leonel A. Zuniga, Ted G. Yoshidome, Nitin Khurana +4 more | 2002-02-26 |