Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486444 | Load-lock with external staging area | Kevin Fairbairn, Howard Grunes, Kelly Colborne | 2002-11-26 |
| 6418874 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Peter Loewenhardt +2 more | 2002-07-16 |