Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420064 | Composite electrodes for solid state devices | Frank Martel, Zheng Tang | 2002-07-16 |
| 6352467 | Integrated electrodeposition and chemical mechanical polishing tool | Sasson Somekh, Bret W. Adams | 2002-03-05 |
| 6350353 | Alternate steps of IMP and sputtering process to improve sidewall coverage | Praburam Gopalraja, Sergio Edelstein, Avi Tepman, Peijun Ding, Nirmalya Maity | 2002-02-26 |