Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435945 | Chemical mechanical polishing with multiple polishing pads | — | 2002-08-20 |
| 6427703 | Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system | — | 2002-08-06 |
| 6394109 | Method and apparatus for removing carbon contamination in a sub-atmospheric charged particle beam lithography system | — | 2002-05-28 |
| 6381021 | Method and apparatus for measuring reflectivity of deposited films | Manoocher Birang | 2002-04-30 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, John M. White | 2002-04-30 |
| 6352467 | Integrated electrodeposition and chemical mechanical polishing tool | Debabrata Ghosh, Bret W. Adams | 2002-03-05 |
| 6343973 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | — | 2002-02-05 |