Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482072 | Method and apparatus for providing and controlling delivery of a web of polishing material | Jayakumar Gurusamy, Gee Sun Hoey | 2002-11-19 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, John M. White, Martin Scales, Ramin Emami, James V. Tietz +1 more | 2002-07-02 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Sasson Somekh, John M. White | 2002-04-30 |
| 6361423 | Chemical mechanical polishing conditioner | Jayakumar Gurusamy | 2002-03-26 |