Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432826 | Planarized Cu cleaning for reduced defects | Shijian Li, Sen-Hou Ko, Fred C. Redeker, Madhavi R. Chandrachood | 2002-08-13 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, John M. White, Lawrence Rosenberg, Martin Scales, James V. Tietz +1 more | 2002-07-02 |