Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488565 | Apparatus for chemical mechanical planarization having nested load cups | Phillip R. Sommer | 2002-12-03 |
| 6485359 | Platen arrangement for a chemical-mechanical planarization apparatus | Shijian Li, Fred C. Redeker, Manoocher Birang | 2002-11-26 |
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | Ernst Keller, Wendell T. Blonigan | 2002-11-12 |
| 6475070 | Chemical mechanical polishing with a moving polishing sheet | — | 2002-11-05 |
| 6471459 | Substrate transfer shuttle having a magnetic drive | Wendell T. Blonigan | 2002-10-29 |
| 6435941 | Apparatus and method for chemical mechanical planarization | — | 2002-08-20 |
| 6435868 | Multi-function chamber for a substrate processing system | Wendell T. Blonigan, Michael W. Richter | 2002-08-20 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, Lawrence Rosenberg, Martin Scales, Ramin Emami, James V. Tietz +1 more | 2002-07-02 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, Sasson Somekh | 2002-04-30 |
| 6371712 | Support frame for substrates | Larry Chang, Emanuel Beer | 2002-04-16 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Quanyuan Shang, Robert Robertson, Soo Young Choi, Kam S. Law +1 more | 2002-03-12 |