Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491570 | Polishing media stabilizer | Paul B. Butterfield | 2002-12-10 |
| 6488565 | Apparatus for chemical mechanical planarization having nested load cups | John M. White | 2002-12-03 |
| 6447374 | Chemical mechanical planarization system | Paul B. Butterfield, Manoocher Birang | 2002-09-10 |