Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Wendell T. Blonigan | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Wendell T. Blonigan | 2002-11-12 |