Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Ernst Keller | 2002-11-12 |
| 6471459 | Substrate transfer shuttle having a magnetic drive | John M. White | 2002-10-29 |
| 6435868 | Multi-function chamber for a substrate processing system | John M. White, Michael W. Richter | 2002-08-20 |
| 6359250 | RF matching network with distributed outputs | Carl A. Sorensen | 2002-03-19 |