Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500265 | Apparatus for electrostatically maintaining subtrate flatness | Robert Robertson, Kam S. Law, James T. Gardner | 2002-12-31 |
| 6468601 | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Robert Robertson, Kam S. Law, Dan Maydan | 2002-10-22 |
| 6432255 | Method and apparatus for enhancing chamber cleaning | Sheng Sun, William Harshbarger, Robert I. Greene | 2002-08-13 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Robert Robertson, Soo Young Choi, Kam S. Law, Robert I. Greene +1 more | 2002-03-12 |