Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432255 | Method and apparatus for enhancing chamber cleaning | Sheng Sun, Quanyuan Shang, William Harshbarger | 2002-08-13 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Quanyuan Shang, Robert Robertson, Soo Young Choi, Kam S. Law +1 more | 2002-03-12 |