Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500356 | Selectively etching silicon using fluorine without plasma | Haruhiro Harry Goto, Kam S. Law | 2002-12-31 |
| 6451390 | Deposition of TEOS oxide using pulsed RF plasma | Haruhiro Harry Goto, Takako Takehara, Carl A. Sorensen, Kam S. Law | 2002-09-17 |
| 6432255 | Method and apparatus for enhancing chamber cleaning | Sheng Sun, Quanyuan Shang, Robert I. Greene | 2002-08-13 |
| 6352910 | Method of depositing amorphous silicon based films having controlled conductivity | Takako Takehara, Jeff Olsen, Regina Qiu, Yvonne LeGrice, Guofu J. Feng +2 more | 2002-03-05 |