Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451390 | Deposition of TEOS oxide using pulsed RF plasma | Haruhiro Harry Goto, Carl A. Sorensen, William Harshbarger, Kam S. Law | 2002-09-17 |
| 6352910 | Method of depositing amorphous silicon based films having controlled conductivity | William Harshbarger, Jeff Olsen, Regina Qiu, Yvonne LeGrice, Guofu J. Feng +2 more | 2002-03-05 |